Photomask Fabrication | |
|---|---|
| Photomask Fabrication |  |
Photolithography | |
| Mask Aligner(Karl Suss MA6_BA6) |  |
| Mask Aligner (OAI Model 5000) |  |
E-beam Lithography | |
| E-beam Lithography |  |
Oxidation & Diffusion | |
| SVCS (4 Stack Furnace) |  |
| Tempress Omega |  |
Thin Film Deposition | |
| PECVD |  |
| LPCVD (Tempress) |  |
Dry Etching | |
| ICPRIE – F- Chemistry |  |
| ICPRIE – Cl- Chemistry |  |
Metallization | |
| Thermal Evaporation - Hydro Pneo Vac Technologies HPVT-305G |  |
| E-beam Evaporation ( HHV ) - Hind Hi Vac BC-300T |  |
| E-beam Evaporation - BOC Edwards Auto 306 |  |
| DC Sputtering - Hind High Vac |  |
| RF Sputtering - Hind High Vac |  |
Polishing | |
| Ultratech Ultrapol USA |  |
Bonding | |
| Bond Aligner - Karl Suss BA6/MA6 |  |
| Substrate Bonder - Karl Suss SB6 |  |
| Wire and Die Bonder TPT HB10 |  |
Dicing | |
| Ultratech USA- Ultraslice |  |
| Advanced Dicing Technology 7100-Provectvs |  |
