The MEMS and Microelectronics programme has been sustained by IITM along with sponsored research for the last forty years and was also part of the Interdisciplinary Research programme (IDRP) introduced by IITM in 2002. The Photonics programme was especially started in 2001 with an initial grant from IITM alumnus Gururaj Deshpande, Chairman of Sycamore Networks, USA and has grown successfully with several significant achievements to their credit. In 2011 a generous funding was received from MeitY to set up a Centre for Nanoelectromechanical Systems (NEMS) and Nanophotonics (CNNP) that addressed two important branches of Nanotechnology: Nanoelectromechanical systems (NEMS) and Nanophotonics, which are closely related to developments in Nanoelectronics. We have successfully set up nanofabrication and characterisation facilities in about 5000 sq. ft Class 1000 Clean room space, including a Class 100 space for lithography, at IITM. Through the research and development in the first phase, we realised a major part of our work leading to various components like RF switches, sensors, membranes, lamellar gratings, silicon photonics devices, resonators, and others. In the second phase of funding received jointly from MeitY, DST and IITM, under NNetrA programme, we augmented the facilities and focused on systems based on these sensors and components. The facilities added and expertise generated during the first phase of the CNNP have enhanced our capability to work in the areas of NEMS and Nanophotonics and brought in participation from many allied departments. Collaboration with Material Engineering, Biochemists, Mechanical Engineers, Instrumentation and Circuits faculty has enabled our work towards systems building.