Process Equipment & Facilities

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ICP Plasma Enhanced Chemical Vapour Deposition (PECVD)

Make / Model: Oxford Instruments / PlasmalabSytsem 100 Dielectric Deposition

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LPCVD

Make / Model: firstnano / easyTube 6000 Dielectric Deposition

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Plasma Enhanced Atomic Layer Deposition (PEALD)

Make / Model: Oxford Instruments Dielectric Deposition

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Deep Reactive Ion etching (DRIE)

Make / Model: Oxford Instruments / PlasmaPro Estrelas100 Dry Etch

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ICPRIE (Cl2&BCl3)

Make / Model: Oxford Instruments / PlasmalabSystem100 Dry Etch

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ICPRIE (Cl2&HBr)

Make / Model: Oxford Instruments / PlasmalabSystem100 Dry Etch

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E Beam Metalization

Make / Model: HHV E-Beam Deposition

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E Beam Metalization HHV

Make / Model: HHV E-Beam Deposition

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Oxidation Furnace

Make / Model: model not specified Furnace Processing

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Rapid Thermal Process (RTP)

Make / Model: AnnealSys / AS-One Furnace Processing

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SVCS (4 Stack Furnace)

Make / Model: model not specified Furnace Processing

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Tempress Furnace

Make / Model: TEMPRESS Furnace Processing

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Critical Point Dryer (CPD)

Make / Model: tousimis / autosamdri 815B In house Development

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Deep UV Lithography Mask Aligner(Karl Suss MA6 BA6)

Make / Model: Karl Suss MA6 BA6 Lithography

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E Beam Lithography RAITH

Make / Model: RAITH 150 two Lithography

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Photo Lithography Mask Aligner(Karl Suss MA6 BA6)

Make / Model: Karl Suss MA6 BA6 Lithography

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Spin Coater HOLMARC

Make / Model: HOLMARC Spin Coater / HO-TH-05 Lithography

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Spin Coater SUSS Microtech

Make / Model: SUSS Microtech Lithography

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DC Magnetron Sputtering HHV

Make / Model: HHV Sputter Deposition

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RF Sputtering (HHV)

Make / Model: HHV Sputter Deposition

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RF Sputtering (Minilab 060)

Make / Model: MOORFIELD / MINILAB060 Sputter Deposition

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Table Top RF Sputtering Nano PVD

Make / Model: MOORFIELD / nanoPVD Sputter Deposition

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Table Top RF Sputtering Nano PVD

Make / Model: MOORFIELD / nanoPVD Sputter Deposition

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Thermal Metal Evaporation

Make / Model: HVPT Thermal Evaporator

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Thermal Metal Evaporation

Make / Model: HVPT Thermal Evaporator

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Constant Temperature Bath (KOH)

Make / Model: DYNATRONIX / DuPRO-1-3 Wet Processing

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HF Vapor Etcher

Make / Model: idonus Wet Processing

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Wet bench Acid Clean

Make / Model: Nano Clean Wet Processing

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Wet bench solvent clean

Make / Model: Nano Clean Wet Processing

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