Title : Single Crystal Growth of pure and doped ?-Ga2O3 by OFZ technique and its characterization
Abstract:
?-Ga2O3 is one of the most promising wide band gap materials for optoelectronic applications as well as a conducting substrate for GaN based device technologies. Single crystals of ?-Ga2O3 exhibit a wide bandgap (~ 4.8 eV) and can be used in optoelectronic devices which are operating in shorter wavelength. Due to the ultra-wide bandgap of this material, it behaves like an insulator. But under reduced conditions, it becomes an n-type semiconductor. The conductivity is mainly due to the oxygen deficiencies in the crystal lattice. Single crystals of undoped and doped (Sn, Si, Nb, Ta, Eu, Zn and Ce) ?-Ga2O3 were grown by Optical Floating Zone technique under various growth atmospheres like O2, Ar, O2/Ar and compressed dry air. Optimizing the growth atmosphere is the key to avoid flaws in the grown crystals[2,6,7]. During growth with optical heaters, ?-Ga2O3 decomposes slowly, oozing out gaseous components like Ga and O2 from the feed rod when it reaches the temperature above 1200 ?. Oxygen atmosphere can be used to avoid decomposition of the molten feed, but, bubbles will be created inside the molten zone in the presence of 100% oxygen atmosphere. The bubbles formed may lead to total collapse of the molten zone. Instead, Ar/O2 partial pressure has been attempted with less oxygen to diffuse out the bubbles formed in the melt. Crystals grown by these methods were bluish in color due to oxygen vacancies[2,7]. Compressed air atmosphere has been successfully used with optimized flow rate towards the development of completely stoichiometric and furrows free transparent Ga2O3 crystals. The properties of ?-Ga2O3 are highly anisotropic. Optimization of wafers processing along different orientation suitable for device development has been carried out. Structural, optical and electrical properties of the wafers were determined. The results are discussed in detail.
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Acknowledgements :
This work was funded by DRDO (Defence Research and Development Organisation) and carried out under the project titled as Development of Single crystal Ga2O3 growth technology for Power Device applications (ERIP/ER/201808007/M/01/1740)